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Inventor

Mirco Kern

Inventor
Boeblingen a.d.R, DE

Overview

4→
Patents
2014–2018
Patent span
Physics
Primary field (CPC G)

Patents· 4 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G02Bprimary
G02BOptical elements, systems or apparatus33%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
10,088,754Illumination system for microlithography20189,606,441'Illumination system for microlithography'20179,280,060'Illumination system for microlithography'20168,873,023'Illumination system for microlithography'2014

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2014–2018Patents assigned to ZEISS CARL SMT GMBH (4)· patent assignee history
2014Patents assigned to BISCHOFF THOMAS (1)· patent assignee history
2014Patents assigned to DAVYDENKO VLADIMIR (1)· patent assignee history
2014Patents assigned to DEGUENTHER MARKUS (1)· patent assignee history
2014Patents assigned to GERHARD MICHAEL (1)· patent assignee history
2014Based in Bobingen, DE· patent location history
2016Based in Boebingen a.d.R, DE· patent location history
2017–2018Based in Boeblingen a.d.R, DE· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ZEISS CARL SMT GMBH42014–2018
BISCHOFF THOMAS12014
DAVYDENKO VLADIMIR12014
DEGUENTHER MARKUS12014
GERHARD MICHAEL12014
Locations
LocationPatentsSpan
Boeblingen a.d.R, DE22017–2018
Boebingen a.d.R, DE12016
Bobingen, DE12014