Inventor
Shou-Wen Kuo
Inventor
Hsinchu, TW
Overview
Patents· 17 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
G06TImage data processing or generation, in general6%
H01JElectric discharge tubes or discharge lamps6%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h106%
G01NInvestigating or analysing materials by determining their chemical or physical properties4%
G05BControl or regulating systems in general4%
H05KPrinted circuits4%
B08BCleaning in general2%
B28DWorking stone or stone-like materials2%
PatentTitleYear
10,876,976Apparatus and method for substrate inspection202010,872,794Automatic in-line inspection system202010,861,723EFEM robot auto teaching methodology202010,852,704Semiconductor equipment management method, electronic device, and non-transitory computer readable storage medium202010,839,507Defect offset correction202010,734,206Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber202010,714,364Apparatus and method for inspecting wafer carriers202010,665,489Integrated chip die carrier exchanger202010,665,507Automated transfer and drying tool for process chamber202010,643,951Mini identification mark in die-less region of semiconductor wafer202010,559,453Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber202010,490,463Automated inspection tool201910,283,388Detaping machine and detaping method201910,170,287Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber20199,852,936Load port and method for loading and unloading cassette20179,786,530'Wafer transfer method and system'20179,460,957'Method and structure for nitrogen-doped shallow-trench isolation dielectric'2016Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2016–2020Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (17)· patent assignee history
2016–2020Based in Hsinchu, TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 17 | 2016–2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Hsinchu, TW | 17 | 2016–2020 |