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Inventor

Kenji Shirasaka

Inventor
Fuchu, JP

Overview

1→
Patents
2015
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material33%
H01LSemiconductor devices33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
9,070,728'Method of lowering temperature of substrate table, computer-readable storage medium, and substrate processing system'2015

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2015Patents assigned to KAI KOZO (1)· patent assignee history
2015Patents assigned to KOBAYASHI KENICHI (1)· patent assignee history
2015Patents assigned to NAKAYAMA YOUICHI (1)· patent assignee history
2015Patents assigned to SHIRASAKA KENJI (1)· patent assignee history
2015Patents assigned to TOKYO ELECTRON LTD (1)· patent assignee history
2015Based in Fuchu, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
KAI KOZO12015
KOBAYASHI KENICHI12015
NAKAYAMA YOUICHI12015
SHIRASAKA KENJIself12015
TOKYO ELECTRON LTD12015
Locations
LocationPatentsSpan
Fuchu, JP12015