Inventor
FUMIHIRO KAMIMURA
Inventor
JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices36%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1036%
B08BCleaning in general18%
B05BSpraying apparatus9%
PatentTitleYear
12,525,469Substrate processing method and substrate processing apparatus202612,362,202Substrate processing method and substrate processing apparatus202511,869,777Substrate processing method and substrate processing apparatus202411,712,710Substrate processing apparatus and substrate processing method2023Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2023–2026Patents assigned to TOKYO ELECTRON LTD (4)· patent assignee history
2023–2026Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 4 | 2023–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 4 | 2023–2026 |