Inventor
Yasuhiro Chouno
Inventor
Tosu, JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1040%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests33%
Y10TTechnical subjects covered by former us classification13%
F04BPositive-displacement machines for liquids7%
H01LSemiconductor devices7%
PatentTitleYear
8,978,670'Substrate processing apparatus'20157,445,689'Substrate processing method and substrate processing system'20087,180,035'Substrate processing device'20077,086,410'Substrate processing apparatus and substrate processing method'20066,186,171'Pneumatically driven liquid supply apparatus'20015,503,171'Substrates-washing apparatus'1996Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1996–2015Patents assigned to TOKYO ELECTRON LTD (6)· patent assignee history
1996–2008Based in Tosu, JP· patent location history
2015Patents assigned to CHOUNO YASUHIRO (1)· patent assignee history
2015Patents assigned to ESHIMA KAZUYOSHI (1)· patent assignee history
2015Patents assigned to KURODA OSAMU (1)· patent assignee history
2015Patents assigned to MINAMIDA JUNYA (1)· patent assignee history
2015Based in Kumamoto, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 6 | 1996–2015 |
| CHOUNO YASUHIROself | 1 | 2015 |
| ESHIMA KAZUYOSHI | 1 | 2015 |
| KURODA OSAMU | 1 | 2015 |
| MINAMIDA JUNYA | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tosu, JP | 5 | 1996–2008 |
| Kumamoto, JP | 1 | 2015 |