Inventor
DUK HYUN SON
Inventor
KR
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices28%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1028%
B25JManipulators13%
H01JElectric discharge tubes or discharge lamps10%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors8%
B08BCleaning in general3%
B23KSoldering or unsoldering3%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices3%
H01FMagnets3%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests3%
PatentTitleYear
12,593,653Transfer unit and substrate treatment apparatus including the same202612,550,669Substrate transfer module and semiconductor manufacturing equipment202612,518,987Equipment front end module, operating method thereof, and substrate processing apparatus including same202612,512,305Plasma processing apparatus and plasma control method using magnetic field202512,400,886Apparatus for transporting substrate and system for treating substrate with the apparatus202512,387,950Transfer assembly and apparatus for treating a substrate with the transfer assembly202512,340,988Ring carrier and substrate treating system202512,198,909Apparatus for treating substrate202511,631,606Substrate storage apparatus and apparatus for processing substrate using the same202311,569,103Apparatus for transporting substrate and system for treating substrate with the apparatus202311,534,859Substrate treatment apparatus2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to SEMES CO LTD (11)· patent assignee history
2022–2026Based in KR· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SEMES CO LTD | 11 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| KR | 11 | 2022–2026 |