LexDanaLexDanabeta
Inventor

HYUN KYO SEO

Inventor
KR

Overview

1→
Patents
2023
Patent span
Performing operations
Primary field (CPC B)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B08Bprimary
B08BCleaning in general25%
B24BMachines, devices, or processes for grinding or polishing25%
H01LSemiconductor devices25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
PatentTitleYear
11,791,173Substrate cleaning equipment, substrate treatment system including the same, and method of fabricating semiconductor device using the substrate cleaning equipment2023

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2023Patents assigned to SAMSUNG ELECTRONICS CO LTD (1)· patent assignee history
2023Based in KR· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
SAMSUNG ELECTRONICS CO LTD12023
Locations
LocationPatentsSpan
KR12023