Inventor
Seokmin Yun
Inventor
Pleasanton, CA, US
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1043%
B08BCleaning in general17%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests17%
C23GCleaning or de-greasing of metallic material by chemical methods other than electrolysis7%
H01LSemiconductor devices7%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h107%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices3%
PatentTitleYear
9,236,279'Method of dielectric film treatment'20168,828,145'Method of particle contaminant removal'20148,617,993'Method of reducing pattern collapse in high aspect ratio nanostructures'20138,277,570'Method of preventing premature drying'20128,277,675'Method of damaged low-k dielectric film layer removal'20128,021,512'Method of preventing premature drying'20117,967,916'Method of preventing pattern collapse during rinsing and drying'20117,810,513'Substrate preparation using megasonic coupling fluid meniscus and methods, apparatus, and systems for implementing the same'20107,597,765'Post etch wafer surface cleaning with liquid meniscus'20097,584,761'Wafer edge surface treatment with liquid meniscus'20097,568,488'Enhanced wafer cleaning method'20097,329,321'Enhanced wafer cleaning method'20087,294,580'Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition'2007Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2007–2016Patents assigned to LAM RES CORP (13)· patent assignee history
2007–2016Based in Pleasanton, CA, US· patent location history
2012–2016Patents assigned to YUN SEOKMIN (5)· patent assignee history
2012–2016Patents assigned to WILCOXSON MARK (3)· patent assignee history
2012Patents assigned to CHO SEONG HWAN (1)· patent assignee history
2013–2016Patents assigned to ZHU JI (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 13 | 2007–2016 |
| YUN SEOKMINself | 5 | 2012–2016 |
| WILCOXSON MARK | 3 | 2012–2016 |
| ZHU JI | 2 | 2013–2016 |
| CHO SEONG HWAN | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Pleasanton, California, US | 13 | 2007–2016 |