Inventor
Richard R. Simmons
Inventor
Los Altos, CA, US
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps47%
G02BOptical elements, systems or apparatus24%
G01NInvestigating or analysing materials by determining their chemical or physical properties6%
G01RMeasuring electric variables6%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices6%
G08BSignalling systems, e.g. personal calling systems6%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h106%
PatentTitleYear
10,861,671Method and system for focus adjustment of a multi-beam scanning electron microscopy system202010,460,905Backscattered electrons (BSE) imaging using multi-beam tools201910,366,862Method and system for noise mitigation in a multi-beam scanning electron microscopy system201910,325,753Method and system for focus adjustment of a multi-beam scanning electron microscopy system201910,192,716Multi-beam dark field imaging201910,186,396Method and system for focus adjustment of a multi-beam scanning electron microscopy system20199,165,742'Inspection site preparation'20155,578,821'Electron beam inspection system and method'19965,502,306'Electron beam inspection system and method'19964,639,587'Automatic focusing system for a microscope'19874,292,513'Heat detector circuit'1981Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1981Patents assigned to CHUBB FIRE SECURITY LTD (1)· patent assignee history
1981Based in Twickenham, GB· patent location history
1987–1996Patents assigned to KLA INSTR CORP (3)· patent assignee history
1987–2020Based in Los Altos, CA, US· patent location history
2015–2020Patents assigned to KLA TENCOR CORP (6)· patent assignee history
2020Patents assigned to KLA CORP (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR CORP | 6 | 2015–2020 |
| KLA INSTR CORP | 3 | 1987–1996 |
| CHUBB FIRE SECURITY LTD | 1 | 1981 |
| KLA CORP | 1 | 2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Los Altos, California, US | 10 | 1987–2020 |
| Twickenham, GB | 1 | 1981 |