Inventor
Kenichi Sugita
Inventor
Tokyo, JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
B24BMachines, devices, or processes for grinding or polishing13%
H01LSemiconductor devices13%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests13%
Y10TTechnical subjects covered by former us classification13%
C07DHeterocyclic compounds7%
C07FAcyclic, carbocyclic or heterocyclic compounds containing elements other than carbon, hydrogen, halogen, oxygen, nitrogen, sulfur, selenium or tellurium7%
H10DInorganic electric semiconductor devices7%
PatentTitleYear
10,629,717High power device202010,008,380Substrate drying apparatus, substrate drying method and control program20188,769,842'Substrate drying apparatus, substrate drying method and control program'20148,087,419'Substrate holding rotating mechanism, and substrate processing apparatus'20127,938,130'Substrate holding rotating mechanism, and substrate processing apparatus'20116,143,732'Sesquiterpene derivatives'2000Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2000Patents assigned to SHIONOGI & CO (1)· patent assignee history
2000Based in Kyotanabe, JP· patent location history
2011–2018Patents assigned to EBARA CORP (4)· patent assignee history
2011–2018Based in Tokyo, JP· patent location history
2012Patents assigned to KANEKO HIROYUKI (1)· patent assignee history
2012Patents assigned to OGAWA TAKAHIRO (1)· patent assignee history
2012Patents assigned to SUGITA KENICHI (1)· patent assignee history
2020Based in Kawasaki, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| EBARA CORP | 4 | 2011–2018 |
| KANEKO HIROYUKI | 1 | 2012 |
| OGAWA TAKAHIRO | 1 | 2012 |
| SHIONOGI & CO | 1 | 2000 |
| SUGITA KENICHIself | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tokyo, JP | 4 | 2011–2018 |
| Kawasaki, JP | 1 | 2020 |
| Kyotanabe, JP | 1 | 2000 |