Inventor
Shoichi Terada
Inventor
Koshi, JP
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1015%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices11%
H01LSemiconductor devices11%
B82YSpecific uses or applications of nanostructures9%
B05CApparatus for applying fluent materials to surfaces, in general7%
B29CShaping or joining of plastics7%
H01JElectric discharge tubes or discharge lamps7%
B08BCleaning in general4%
H05BElectric heating4%
Y02BClimate change mitigation technologies related to buildings, e.g. housing, house appliances or related end-user applications4%
PatentTitleYear
10,591,823Substrate processing apparatus and substrate processing method202010,347,482Substrate processing apparatus, substrate processing method, and storage medium with program stored therein for executing substrate processing method201910,237,959Discharge lamp lighting device20199,744,551'Coating apparatus and nozzle'20178,888,920'Imprint system, imprint method, and non-transitory computer storage medium'20148,840,728'Imprint system for performing a treatment on a template'20148,522,712'Template treatment method, program, computer storage medium, template treatment apparatus and imprint system'20138,468,943'Imprint method, computer storage medium and imprint apparatus'20138,410,697'Light source device'20137,649,319'Ultra-high pressure mercury lamp'20106,563,082'Laser cutting method, laser cutting apparatus, and method and apparatus for manufacturing liquid crystal device'2003Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2003–2019Based in Kumamoto, JP· patent location history
2010–2019Patents assigned to USHIO ELECTRIC INC (3)· patent assignee history
2010–2019Based in Himeji, JP· patent location history
2013–2020Patents assigned to TOKYO ELECTRON LTD (7)· patent assignee history
2013–2014Patents assigned to TERADA SHOICHI (5)· patent assignee history
2013–2014Patents assigned to KITANO TAKAHIRO (4)· patent assignee history
2013Patents assigned to HIROSHIRO KOUKICHI (2)· patent assignee history
2013–2020Based in Koshi, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 7 | 2013–2020 |
| TERADA SHOICHIself | 5 | 2013–2014 |
| KITANO TAKAHIRO | 4 | 2013–2014 |
| USHIO ELECTRIC INC | 3 | 2010–2019 |
| HIROSHIRO KOUKICHI | 2 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Koshi, JP | 5 | 2013–2020 |
| Kumamoto, JP | 3 | 2003–2019 |
| Himeji, JP | 3 | 2010–2019 |