Inventor
Sebastianus Adrianus Goorden
Inventor
Eindhoven, NL
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices48%
G01BMeasuring length, thickness or similar linear dimensions20%
G01NInvestigating or analysing materials by determining their chemical or physical properties16%
G02BOptical elements, systems or apparatus12%
G01DMeasuring not specially adapted for a specific variable4%
PatentTitleYear
11,086,240Metrology sensor, lithographic apparatus and method for manufacturing devices202111,042,096Alignment measurement system202111,022,902Sensor, lithographic apparatus, and device manufacturing method202110,942,461Alignment measurement system202110,788,766Metrology sensor, lithographic apparatus and method for manufacturing devices202010,788,765Method and apparatus for measuring a structure on a substrate202010,649,345Methods and apparatuses for measurement of a parameter of a feature fabricated on a substrate202010,599,047Metrology apparatus, lithographic system, and method of measuring a structure202010,527,959Position sensor, lithographic apparatus and method for manufacturing devices202010,317,808Position sensing arrangement and lithographic apparatus including such an arrangement, position sensing method and device manufacturing method201910,303,064Radiation conditioning system, illumination system and metrology apparatus, device manufacturing method201910,234,767Device and method for processing a radiation beam with coherence2019Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2019–2021Patents assigned to ASML NETHERLANDS BV (12)· patent assignee history
2019–2021Based in Eindhoven, NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 12 | 2019–2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Eindhoven, NL | 12 | 2019–2021 |