Inventor
Chuxiong Hu
Inventor
Beijing, CN
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices27%
G01BMeasuring length, thickness or similar linear dimensions13%
G01DMeasuring not specially adapted for a specific variable13%
B64GCosmonautics7%
F16FSprings7%
G01MTesting static or dynamic balance of machines or structures7%
G02BOptical elements, systems or apparatus7%
G05DSystems for controlling or regulating non-electric variables7%
H02KDynamo-electric machines7%
H02NElectric machines not otherwise provided for7%
PatentTitleYear
10,532,832Magnetic levitation reaction sphere20209,995,569Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage20189,869,857'Optical grating phase modulator for laser interference photoetching system'20189,766,054'Planar motor rotor displacement measuring device and its measuring method'20179,752,643'Negative stiffness system for gravity compensation of micropositioner'2017Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2017–2020Patents assigned to UNIV TSINGHUA (5)· patent assignee history
2017Patents assigned to SHANGHAI MICROELECTRONICS EQUI (2)· patent assignee history
2017–2020Based in Beijing, CN· patent location history
2018–2020Patents assigned to BEIJING U PREC TECH CO LTD (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| UNIV TSINGHUA | 5 | 2017–2020 |
| BEIJING U PREC TECH CO LTD | 2 | 2018–2020 |
| SHANGHAI MICROELECTRONICS EQUI | 2 | 2017 |
Locations
| Location | Patents | Span |
|---|---|---|
| Beijing, CN | 5 | 2017–2020 |