Inventor
Yang Yang
Inventor
Los Gatos, CA, US
Overview
Patents· 33 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps21%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1014%
H01LSemiconductor devices10%
H10KOrganic electric solid-state devices6%
C23CCoating metallic material5%
Y10TTechnical subjects covered by former us classification4%
C09KMaterials for miscellaneous applications, not provided for elsewhere3%
C30BSingle-crystal growth3%
H01BCables3%
H05HPlasma technique3%
PatentTitleYear
10,818,472Methods of optical device fabrication using an electron beam apparatus202010,790,153Methods and apparatus for electron beam etching process202010,784,085Plasma processing reactor with a magnetic electron-blocking filter external of the chamber and uniform field within the chamber202010,707,086Etching methods202010,656,016Computationally-assisted multi-heterodyne spectroscopy202010,544,505Deposition or treatment of diamond-like carbon in a plasma reactor202010,475,626Ion-ion plasma atomic layer etch process and reactor201910,395,904Method of real time in-situ chamber condition monitoring using sensors and RF communication201910,249,479Magnet configurations for radial uniformity tuning of ICP plasmas201910,249,495Diamond like carbon layer formed by an electron beam plasma process201910,167,560Method and apparatus for structural coloration of metallic surfaces201910,170,278Inductively coupled plasma source201910,153,139Multiple electrode substrate support assembly and phase control system201810,141,166Method of real time in-situ chamber condition monitoring using sensors and RF communication201810,126,170Computationally-assisted multi-heterodyne spectroscopy201810,115,566Method and apparatus for controlling a magnetic field in a plasma chamber201810,017,857Method and apparatus for controlling plasma near the edge of a substrate20189,912,926'Biochemistry measurement device and method thereof'20189,784,084'Method for heating oil shale subsurface in-situ'20179,659,751'System and method for selective coil excitation in inductively coupled plasma processing reactors'20179,613,783'Method and apparatus for controlling a magnetic field in a plasma chamber'20179,472,379'Method of multiple zone symmetric gas injection for inductively coupled plasma'20169,449,794'Symmetrical inductively coupled plasma source with side RF feeds and spiral coil antenna'20169,412,563'Spatially discrete multi-loop RF-driven plasma source having plural independent zones'20169,373,823'Organic electronic device and method for manufacturing the same'20169,161,428'Independent control of RF phases of separate coils of an inductively coupled plasma reactor'20158,734,664'Method of differential counter electrode tuning in an RF plasma reactor'20147,746,684'Operating process of organic device'20107,345,254'Die sorting apparatus and method'20086,160,346'Organic electroluminescent device with housing'20005,912,473'Method of manufacturing organic oriented film and method of manufacturing electronic device'19995,556,706'Conductive layered product and method of manufacturing the same'19965,546,889'Method of manufacturing organic oriented film and method of manufacturing electronic device'1996Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1996–1999Patents assigned to MATSUSHITA ELECTRIC INDUSTRIAL CO LTD (3)· patent assignee history
1996–1999Based in Santa Barbara, CA, US· patent location history
2008Patents assigned to ASM ASSEMBLY AUTOMATION LTD (1)· patent assignee history
2014–2020Patents assigned to APPLIED MATERIALS INC (21)· patent assignee history
2014–2019Based in Sunnyvale, CA, US· patent location history
2016Patents assigned to CHIBA TAKAYUKI (1)· patent assignee history
2016–2020Based in Los Gatos, CA, US· patent location history
2018–2020Patents assigned to MASSACHUSETTS INST TECHNOLOGY (2)· patent assignee history
2018–2020Based in Cambridge, MA, US· patent location history
2019–2020Based in San Diego, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 21 | 2014–2020 |
| MATSUSHITA ELECTRIC INDUSTRIAL CO LTD | 3 | 1996–1999 |
| MASSACHUSETTS INST TECHNOLOGY | 2 | 2018–2020 |
| ASM ASSEMBLY AUTOMATION LTD | 1 | 2008 |
| CHIBA TAKAYUKI | 1 | 2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Los Gatos, California, US | 9 | 2016–2020 |
| Sunnyvale, California, US | 8 | 2014–2019 |
| San Diego, California, US | 3 | 2019–2020 |
| Santa Barbara, California, US | 3 | 1996–1999 |
| Cambridge, Massachusetts, US | 2 | 2018–2020 |