Inventor
Kevin L. Siefering
Inventor
Excelsior, MN, US
Overview
Patents· 16 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1034%
H01LSemiconductor devices11%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h108%
B08BCleaning in general5%
B24CAbrasive or related blasting with particulate material5%
G05BControl or regulating systems in general5%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests5%
Y10TTechnical subjects covered by former us classification5%
B05BSpraying apparatus3%
C03CChemical composition of glasses, glazes or vitreous enamels3%
PatentTitleYear
9,911,631'Processing system and method for providing a heated etching solution'20189,831,107Processing system and method for providing a heated etching solution20179,490,138'Method of substrate temperature control during high temperature wet processing'20169,412,639'Method of using separate wafer contacts during wafer processing'20167,312,161'Advanced process control for low variation treatment in immersion processing'20077,025,831'Apparatus for surface conditioning'20066,845,779'Edge gripping device for handling a set of semiconductor wafers in an immersion processing system'20056,284,006'Processing apparatus for microelectronic devices in which polymeric bellows are used to help accomplish substrate transport inside of the apparatus'20016,251,195'Method for transferring a microelectronic device to and from a processing chamber'20016,221,781'Combined process chamber with multi-positionable pedestal'20016,015,503'Method and apparatus for surface conditioning'20005,942,037'Rotatable and translatable spray nozzle'19995,810,942'Aerodynamic aerosol chamber'19985,373,701'Cryogenic station'19945,304,796'Atmospheric pressure ionization mass spectroscopy method including a silica gel drying step'19945,224,265'Fabrication of discrete thin film wiring structures'1993Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1993Patents assigned to IBM (1)· patent assignee history
1993–1994Based in Cary, NC, US· patent location history
1994Patents assigned to BOC GROUP INC (2)· patent assignee history
1998–2007Patents assigned to FSI INT INC (9)· patent assignee history
1998–2006Based in Chaska, MN, US· patent location history
2001–2018Based in Excelsior, MN, US· patent location history
2016–2018Patents assigned to TEL FSI INC (4)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| FSI INT INC | 9 | 1998–2007 |
| TEL FSI INC | 4 | 2016–2018 |
| BOC GROUP INC | 2 | 1994 |
| IBM | 1 | 1993 |
Locations
| Location | Patents | Span |
|---|---|---|
| Excelsior, Minnesota, US | 9 | 2001–2018 |
| Chaska, Minnesota, US | 4 | 1998–2006 |
| Cary, NC, US | 3 | 1993–1994 |