Inventor
ILYA LAVITSKY
Inventor
US
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material26%
H01JElectric discharge tubes or discharge lamps26%
LOC1526%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1016%
LOC125%
PatentTitleYear
D1037954Self-retained low friction pad202412,027,354Cleaning of SIN with CCP plasma or RPS clean202411,915,918Cleaning of sin with CCP plasma or RPS clean202411,670,493Isolator ring clamp and physical vapor deposition chamber incorporating same202311,618,943PVD target having self-retained low friction pads2023D0970566Sputter target for a physical vapor deposition chamber202211,339,466Heated shield for physical vapor deposition chamber2022D0941372Process shield for a substrate processing chamber2022D0941371Process shield for a substrate processing chamber2022D0937329Sputter target for a physical vapor deposition chamber2021D0934315Deposition ring for a substrate processing chamber2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2024Patents assigned to APPLIED MATERIALS INC (11)· patent assignee history
2021–2024Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 11 | 2021–2024 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 11 | 2021–2024 |