Inventor
Kazunori Tsujimoto
Inventor
Higashiyamato, JP
Overview
Patents· 30 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1047%
H01JElectric discharge tubes or discharge lamps34%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests12%
C23CCoating metallic material2%
C23FNon-mechanical removal of metallic material from surface2%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices2%
H10DInorganic electric semiconductor devices2%
PatentTitleYear
7,071,114'Method and apparatus for dry etching'20066,713,401'Method for manufacturing semiconductor device'20046,562,722'Method and apparatus for dry etching'20036,333,273'Method and apparatus for dry etching'20016,332,425'Surface treatment method and system'20016,231,777'Surface treatment method and system'20016,136,721'Method and apparatus for dry etching'20006,033,481'Plasma processing apparatus'20006,008,133'Method and apparatus for dry etching'19995,891,252'Plasma processing apparatus'19995,795,832'Method and apparatus for dry etching'19985,705,029'Dry etching method'19985,650,038'Method for dry etching'19975,643,473'Dry etching method'19975,474,650'Method and apparatus for dry etching'19955,409,562'Dry-etching method and apparatus'19955,368,685'Dry etching apparatus and method'19945,354,418'Method for dry etching'19945,354,416'Dry etching method'19945,318,667'Method and apparatus for dry etching'19945,270,232'Process for fabricating field effect transistor'19935,242,539'Plasma treatment method and apparatus'19935,147,500'Dry etching method'19924,992,136'Dry etching method'19914,986,877'Method of dry etching'19914,985,114'Dry etching by alternately etching and depositing'19914,956,043'Dry etching apparatus'19904,943,344'Etching method'19904,911,812'Plasma treating method and apparatus therefor'19904,857,137'Process for surface treatment'1989Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1989–2006Patents assigned to HITACHI LTD (29)· patent assignee history
1990–2006Based in Higashiyamato, JP· patent location history
1994Patents assigned to OKUDAIRA SADAYUKI (1)· patent assignee history
1994Patents assigned to TACHI SHINICHI (1)· patent assignee history
1994Patents assigned to TSUJIMOTO KAZUNORI (1)· patent assignee history
1995Based in Tokyo, JP· patent location history
1997Based in Higashi, JP· patent location history
1999Based in Higashiyamoto, JP· patent location history
2000Based in Yamato, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI LTD | 29 | 1989–2006 |
| OKUDAIRA SADAYUKI | 1 | 1994 |
| TACHI SHINICHI | 1 | 1994 |
| TSUJIMOTO KAZUNORIself | 1 | 1994 |
Locations
| Location | Patents | Span |
|---|---|---|
| Higashiyamato, JP | 25 | 1990–2006 |
| Yamato, JP | 1 | 2000 |
| Higashiyamoto, JP | 1 | 1999 |
| Higashi, JP | 1 | 1997 |
| Tokyo, JP | 1 | 1995 |