Inventor
Matthew T. Tiersch
Inventor
Essex Junction, VT, US
Overview
Patents· 15 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C09Gprimary
C09GPolishing compositions22%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
C09KMaterials for miscellaneous applications, not provided for elsewhere20%
B24BMachines, devices, or processes for grinding or polishing7%
G01RMeasuring electric variables7%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h107%
C11DDetergent compositions5%
C23FNon-mechanical removal of metallic material from surface5%
H01LSemiconductor devices5%
PatentTitleYear
9,708,508'Slurry for chemical-mechanical polishing of metals and use thereof'20179,057,004'Slurry for chemical-mechanical polishing of metals and use thereof'20158,806,740'Silicon chicklet pedestal'20148,734,665'Slurry for chemical-mechanical polishing of copper and use thereof'20148,636,917'Solution for forming polishing slurry, polishing slurry and related methods'20148,595,919'Silicon chicklet pedestal'20138,328,892'Solution for forming polishing slurry, polishing slurry and related methods'20128,088,690'CMP method'20127,987,591'Method of forming silicon chicklet pedestal'20117,824,568'Solution for forming polishing slurry, polishing slurry and related methods'20106,355,565'Chemical-mechanical-polishing slurry and method for polishing metal/oxide layers'20026,294,105'Chemical mechanical polishing slurry and method for polishing metal/oxide layers'20015,944,583'Composite polish pad for CMP'19995,885,135'CMP wafer carrier for preferential polishing of a wafer'19995,842,910'Off-center grooved polish pad for CMP'1998Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1998–2015Patents assigned to IBM (14)· patent assignee history
1998–2017Based in Essex Junction, VT, US· patent location history
2012–2015Patents assigned to TIERSCH MATTHEW T (7)· patent assignee history
2012–2015Patents assigned to WHITE ERIC J (5)· patent assignee history
2012–2015Patents assigned to BATES GRAHAM M (3)· patent assignee history
2012–2015Patents assigned to SHAH EVA A (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| IBM | 14 | 1998–2015 |
| TIERSCH MATTHEW Tself | 7 | 2012–2015 |
| WHITE ERIC J | 5 | 2012–2015 |
| BATES GRAHAM M | 3 | 2012–2015 |
| SHAH EVA A | 3 | 2012–2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Essex Junction, VT, US | 15 | 1998–2017 |