Inventor
Nobuo Ishimaru
Inventor
Takaoka, JP
Overview
Patents· 18 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material30%
H01JElectric discharge tubes or discharge lamps25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
H10DInorganic electric semiconductor devices11%
H01LSemiconductor devices4%
B21FWorking or processing of metal wire2%
B23PMetal-working not otherwise provided for2%
C04BLime, magnesia2%
E04CStructural elements2%
Y10TTechnical subjects covered by former us classification2%
PatentTitleYear
9,373,499'Batch-type remote plasma processing apparatus'20169,039,912'Batch-type remote plasma processing apparatus'20158,875,656'Substrate processing apparatus'20148,544,411'Batch-type remote plasma processing apparatus'20138,518,182'Substrate processing apparatus'20138,453,600'Substrate processing apparatus'20138,297,224'Substrate processing apparatus'20128,261,692'Substrate processing apparatus and reaction container'20128,251,012'Substrate processing apparatus and semiconductor device producing method'20128,092,603'Substrate processing apparatus'20128,093,072'Substrate processing apparatus and method of manufacturing semiconductor device'20128,047,158'Substrate processing apparatus and reaction container'20118,028,652'Batch-type remote plasma processing apparatus'20118,020,514'Batch-type remote plasma processing apparatus'20117,958,842'Substrate processing apparatus'20117,900,580'Substrate processing apparatus and reaction container'20117,861,668'Batch-type remote plasma processing apparatus'20117,767,053'Substrate processing apparatus and substrate processing method'2010Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2010–2016Patents assigned to HITACHI INT ELECTRIC INC (18)· patent assignee history
2010–2013Based in Tokyo, JP· patent location history
2011–2014Based in Takaoka, JP· patent location history
2012–2014Patents assigned to ISHIMARU NOBUO (9)· patent assignee history
2012–2014Patents assigned to KONTANI TADASHI (4)· patent assignee history
2012–2013Patents assigned to TOYODA KAZUYUKI (3)· patent assignee history
2012–2014Patents assigned to SHIMA NOBUHITO (2)· patent assignee history
2015–2016Based in Nakano-ku, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI INT ELECTRIC INC | 18 | 2010–2016 |
| ISHIMARU NOBUOself | 9 | 2012–2014 |
| KONTANI TADASHI | 4 | 2012–2014 |
| TOYODA KAZUYUKI | 3 | 2012–2013 |
| SHIMA NOBUHITO | 2 | 2012–2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Takaoka, JP | 8 | 2011–2014 |
| Tokyo, JP | 8 | 2010–2013 |
| Nakano-ku, JP | 2 | 2015–2016 |