Inventor
Arthur P. Riaf
Inventor
Gloucester, MA, US
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1031%
H01JElectric discharge tubes or discharge lamps25%
H01LSemiconductor devices19%
F16CShafts13%
Y10TTechnical subjects covered by former us classification13%
PatentTitleYear
10,658,207Platen for reducing particle contamination on a substrate and a method thereof202010,001,161Rotary flex union20189,953,849Platen for reducing particle contamination on a substrate and a method thereof20189,377,048'Rotary flex union'20168,963,337'Thin wafer support assembly'20158,681,472'Platen ground pin for connecting substrate to ground'20148,149,256'Techniques for changing temperature of a platen'2012Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2012–2016Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT (4)· patent assignee history
2012–2014Patents assigned to RIAF ARTHUR P (2)· patent assignee history
2012Patents assigned to ANELLA STEVEN M (1)· patent assignee history
2012Patents assigned to BARSKY SAMUEL M (1)· patent assignee history
2012–2020Based in Gloucester, MA, US· patent location history
2018–2020Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT ASS INC (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| VARIAN SEMICONDUCTOR EQUIPMENT | 4 | 2012–2016 |
| VARIAN SEMICONDUCTOR EQUIPMENT ASS INC | 3 | 2018–2020 |
| RIAF ARTHUR Pself | 2 | 2012–2014 |
| ANELLA STEVEN M | 1 | 2012 |
| BARSKY SAMUEL M | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Gloucester, Massachusetts, US | 7 | 2012–2020 |