Inventor
Hiromi Sakima
Inventor
Beverly, MA, US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1031%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1019%
H01JElectric discharge tubes or discharge lamps13%
Y02CCapture, storage, sequestration or disposal of greenhouse gases [ghg]13%
Y02PClimate change mitigation technologies in the production or processing of goods13%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests13%
PatentTitleYear
7,481,230'Plasma processing method and apparatus'20096,465,359'Etchant for use in a semiconductor processing method and system'20026,455,411'Defect and etch rate control in trench etch for dual damascene patterning of low-k dielectrics'20026,159,862'Semiconductor processing method and system using C.sub.5 F.sub.8'20005,556,500'Plasma etching apparatus'1996Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1996–2009Patents assigned to TOKYO ELECTRON LTD (4)· patent assignee history
1996Patents assigned to TOSHIBA KK (1)· patent assignee history
1996Based in Machida, JP· patent location history
2000–2002Based in Beverly, MA, US· patent location history
2002Patents assigned to TEXAS INSTRUMENTS INC (1)· patent assignee history
2002Based in Richardson, TX, US· patent location history
2009Based in Nirasaki, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 4 | 1996–2009 |
| TEXAS INSTRUMENTS INC | 1 | 2002 |
| TOSHIBA KK | 1 | 1996 |
Locations
| Location | Patents | Span |
|---|---|---|
| Beverly, Massachusetts, US | 2 | 2000–2002 |
| Nirasaki, JP | 1 | 2009 |
| Richardson, Texas, US | 1 | 2002 |
| Machida, JP | 1 | 1996 |