Inventor

Shao-Yen Ku

Inventor

Jhubei City, TW

Overview

33→

Patents

2002–2020

Patent span

Electricity

Primary field (CPC H)

Patents· 33 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary

H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1034%

H01LSemiconductor devices25%

H10DInorganic electric semiconductor devices9%

B08BCleaning in general5%

Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests4%

C11DDetergent compositions3%

F16LPipes2%

F17DPipe-line systems2%

G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices2%

G05BControl or regulating systems in general2%

PatentTitleYear

10,780,461Methods for processing substrate in semiconductor fabrication2020 10,510,527Single wafer cleaning tool with H2019 10,497,557Integrated platform for improved wafer manufacturing quality2019 10,486,204Semiconductor apparatus and method of removing photoresist layer on substrate2019 10,276,469Method for forming semiconductor device structure2019 10,161,545Chemical dispense system with reduced contamination2018 9,997,384Methods for transporting wafers between wafer holders and chambers2018 9,887,095'System and method for an etch process with silicon concentration control'2018 9,881,816'Cleaning composition and method for semiconductor device fabrication'2018 9,805,946'Photoresist removal'2017 9,781,994'Wafer cleaning'2017 9,764,364'Apparatus and methods for movable megasonic wafer probe'2017 9,728,533'Aqueous cleaning techniques and compositions for use in semiconductor device manufacture'2017 9,704,714'Method for controlling surface charge on wafer surface in semiconductor fabrication'2017 9,601,360'Wafer transport method'2017 9,583,352'Method of etching and cleaning wafers'2017 9,494,261'Chemical dispense system with reduced contamination'2016 9,478,444'Mechanisms for cleaning wafer and scrubber'2016 9,349,617'Mechanisms for wafer cleaning'2016 9,263,337'Semiconductor device and method of manufacture'2016 9,136,149'Loading port, system for etching and cleaning wafers and method of use'2015 9,117,760'Method and system for energized and pressurized liquids for cleaning/etching applications in semiconductor manufacturing'2015 9,064,807'Integrated platform for improved wafer manufacturing quality'2015 9,048,089'Apparatus to improve internal wafer temperature profile'2015 8,926,762'Apparatus and methods for movable megasonic wafer probe'2015 8,916,429'Aqueous cleaning techniques and compositions for use in semiconductor device manufacturing'2014 8,616,821'Integrated apparatus to assure wafer quality and manufacturability'2013 8,518,634'Cleaning process for semiconductor device fabrication'2013 8,105,851'Nitride film wet stripping'2012 7,776,757'Method of fabricating high-k metal gate devices'2010 7,585,737'Method of manufacturing double diffused drains in semiconductor devices'2009 6,703,320'Successful and easy method to remove polysilicon film'2004 6,455,405'Using implantation method to control gate oxide thickness on dual oxide semiconductor devices'2002

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2002–2016Patents assigned to TAIWAN SEMICONDUCTOR MFG (11)· patent assignee history

2002–2004Based in Hsinchu, TW· patent location history

2009–2020Based in Jhubei City, TW· patent location history

2012–2016Patents assigned to KU SHAO-YEN (6)· patent assignee history

2012–2015Patents assigned to YANG CHI-MING (4)· patent assignee history

2013–2015Patents assigned to LIN CHIN-HSIANG (3)· patent assignee history

2015–2020Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (22)· patent assignee history

2018Based in Hsinchu County, TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
TAIWAN SEMICONDUCTOR MFG CO LTD	22	2015–2020
TAIWAN SEMICONDUCTOR MFG	11	2002–2016
KU SHAO-YENself	6	2012–2016
YANG CHI-MING	4	2012–2015
LIN CHIN-HSIANG	3	2013–2015

Locations

Location	Patents	Span
Jhubei City, TW	30	2009–2020
Hsinchu, TW	2	2002–2004
Hsinchu County, TW	1	2018