Inventor
Motoshi Takagi
Inventor
Itami, JP
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
5,720,814'Photoresist coating apparatus'1998Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1998Patents assigned to MITSUBISHI ELECTRIC CORP (1)· patent assignee history
1998Patents assigned to RYODEN SEMICONDUCTOR SYST ENG (1)· patent assignee history
1998Based in Itami, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| MITSUBISHI ELECTRIC CORP | 1 | 1998 |
| RYODEN SEMICONDUCTOR SYST ENG | 1 | 1998 |
Locations
| Location | Patents | Span |
|---|---|---|
| Itami, JP | 1 | 1998 |