Inventor
Saravanapriyan Sriraman
Inventor
Fremont, CA, US
Overview
Patents· 25 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
H01JElectric discharge tubes or discharge lamps20%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices12%
G06FElectric digital data processing12%
H01LSemiconductor devices11%
C23CCoating metallic material5%
G01BMeasuring length, thickness or similar linear dimensions4%
G01NInvestigating or analysing materials by determining their chemical or physical properties4%
H05HPlasma technique4%
F24FAir-conditioning3%
PatentTitleYear
10,997,345Method of etch model calibration using optical scatterometry202110,825,661Systems for cooling RF heated chamber components202010,690,374Air cooled faraday shield and methods for using the same202010,585,347Photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch profile modeling framework202010,572,697Method of etch model calibration using optical scatterometry202010,534,257Layout pattern proximity correction through edge placement error prediction202010,460,951Gas reaction trajectory control through tunable plasma dissociation for wafer by-product distribution and etch feature profile uniformity201910,410,832Control of on-wafer CD uniformity with movable edge ring and gas injection adjustment201910,386,828Methods and apparatuses for etch profile matching by surface kinetic model optimization201910,303,830Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization201910,262,867Fast-gas switching for etching201910,254,641Layout pattern proximity correction through fast edge placement error prediction201910,249,511Ceramic showerhead including central gas injector for tunable convective-diffusive gas flow in semiconductor substrate processing apparatus201910,242,845Near-substrate supplemental plasma density generation with low bias voltage within inductively coupled plasma processing chamber201910,197,908Photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch profile modeling framework201910,163,610Extreme edge sheath and wafer profile tuning through edge-localized ion trajectory control and plasma operation20189,996,647Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization20189,978,565Systems for cooling RF heated chamber components20189,966,270Gas reaction trajectory control through tunable plasma dissociation for wafer by-product distribution and etch feature profile uniformity20189,885,493'Air cooled faraday shield and methods for using the same'20189,792,393'Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization'20179,640,408'Fast-gas switching for etching'20179,275,869'Fast-gas switching for etching'20169,053,908'Method and apparatus for controlling substrate DC-bias and ion energy and angular distribution during substrate etching'20157,303,999'Multi-step method for etching strain gate recesses'2007Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2007–2021Patents assigned to LAM RES CORP (25)· patent assignee history
2007–2021Based in Fremont, CA, US· patent location history
2018Patents assigned to HOLLAND JOHN (1)· patent assignee history
2018Patents assigned to MARSH RICKY (1)· patent assignee history
2018Patents assigned to MCCHESNEY JON (1)· patent assignee history
2018Patents assigned to PATERSON ALEX (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 25 | 2007–2021 |
| HOLLAND JOHN | 1 | 2018 |
| MARSH RICKY | 1 | 2018 |
| MCCHESNEY JON | 1 | 2018 |
| PATERSON ALEX | 1 | 2018 |
Locations
| Location | Patents | Span |
|---|---|---|
| Fremont, California, US | 25 | 2007–2021 |