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Inventor

Ryuichi Fukunishi

Inventor
Aizuwakamatsu, JP

Overview

1→
Patents
1998
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H02Nprimary
H02NElectric machines not otherwise provided for33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
Y10TTechnical subjects covered by former us classification33%
PatentTitleYear
5,777,838'Electrostatic chuck and method of attracting wafer'1998

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1998Patents assigned to FUJITSU LTD (1)· patent assignee history
1998Based in Aizuwakamatsu, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
FUJITSU LTD11998
Locations
LocationPatentsSpan
Aizuwakamatsu, JP11998