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Inventor

SEUNG YOON SONG

Inventor
KR

Overview

2→
Patents
2022
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps29%
H01LSemiconductor devices29%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1014%
PatentTitleYear
11,521,866Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus202211,437,264Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022Patents assigned to SAMSUNG ELECTRONICS CO LTD (2)· patent assignee history
2022Based in KR· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
SAMSUNG ELECTRONICS CO LTD22022
Locations
LocationPatentsSpan
KR22022