Inventor
Juergen Reich
Inventor
Campbell, CA, US
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Nprimary
G01NInvestigating or analysing materials by determining their chemical or physical properties55%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1015%
F21VFunctional features or details of lighting devices or systems thereof10%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices10%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light5%
G02BOptical elements, systems or apparatus5%
PatentTitleYear
9,664,909'Monolithic optical beam splitter with focusing lens'20179,255,891'Inspection beam shaping for improved detection sensitivity'20169,194,812'Illumination energy management in surface inspection'20159,182,358'Multi-spot defect inspection system'20159,116,132'Surface scanning inspection system with independently adjustable scan pitch'20158,934,091'Monitoring incident beam position in a wafer inspection system'20158,885,158'Surface scanning inspection system with adjustable scan pitch'20148,786,850'Illumination energy management in surface inspection'20148,755,044'Large particle detection for multi-spot surface scanning inspection systems'20148,269,960'Computer-implemented methods for inspecting and/or classifying a wafer'20127,528,944'Methods and systems for detecting pinholes in a film formed on a wafer or for monitoring a thermal process tool'20097,511,816'Methods and systems for determining drift in a position of a light beam with respect to a chuck'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009Patents assigned to KLA TENCOR TECH CORP (2)· patent assignee history
2009–2017Based in Campbell, CA, US· patent location history
2009Based in San Francisco, CA, US· patent location history
2012–2017Patents assigned to KLA TENCOR CORP (10)· patent assignee history
2012–2014Patents assigned to REICH JUERGEN (3)· patent assignee history
2014Patents assigned to WOLTERS CHRISTIAN (2)· patent assignee history
2014Patents assigned to AMSDEN CHARLES (1)· patent assignee history
2016Based in Milpitas, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR CORP | 10 | 2012–2017 |
| REICH JUERGENself | 3 | 2012–2014 |
| KLA TENCOR TECH CORP | 2 | 2009 |
| WOLTERS CHRISTIAN | 2 | 2014 |
| AMSDEN CHARLES | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Campbell, California, US | 10 | 2009–2017 |
| Milpitas, California, US | 1 | 2016 |
| San Francisco, California, US | 1 | 2009 |