Inventor
Heung Lak Park
Inventor
San Jose, CA, US
Overview
Patents· 18 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
C23CCoating metallic material23%
H01LSemiconductor devices13%
G01BMeasuring length, thickness or similar linear dimensions10%
G01NInvestigating or analysing materials by determining their chemical or physical properties10%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h108%
H10DInorganic electric semiconductor devices5%
C23FNon-mechanical removal of metallic material from surface2%
H10BElectronic memory devices2%
PatentTitleYear
10,793,954PECVD process202010,074,534Ultra-conformal carbon film deposition201810,060,032PECVD process201810,030,306PECVD apparatus and process20189,816,187'PECVD process'20179,721,784'Ultra-conformal carbon film deposition'20179,458,537'PECVD process'20169,157,730'PECVD process'20158,563,095'Silicon nitride passivation layer for covering high aspect ratio features'20138,349,741'Amorphous carbon deposition method for improved stack defectivity'20138,298,887'High mobility monolithic p-i-n diodes'20128,227,352'Amorphous carbon deposition method for improved stack defectivity'20127,897,198'Electroless layer plating process and apparatus'20117,531,463'Fabrication of semiconductor interconnect structure'20097,338,908'Method for fabrication of semiconductor interconnect structure with reduced capacitance, leakage current, and improved breakdown voltage'20086,962,873'Nitridation of electrolessly deposited cobalt'20055,918,142'Method for fabricating a semiconductor device'19995,739,049'Method for fabricating semiconductor device having a capacitor and a method of forming metal wiring on a semiconductor substrate'1998Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1998Based in Ichon, KR· patent location history
1999Based in Ichon-shi, KR· patent location history
2005–2011Patents assigned to NOVELLUS SYSTEMS INC (4)· patent assignee history
2005–2011Based in Wilsonville, OR, US· patent location history
2012–2020Patents assigned to APPLIED MATERIALS INC (12)· patent assignee history
2012–2013Patents assigned to KIM BOK HOEN (4)· patent assignee history
2012–2013Patents assigned to PARK HEUNG LAK (4)· patent assignee history
2012–2013Patents assigned to CAI MAN-PING (2)· patent assignee history
2012–2016Based in Santa Clara, CA, US· patent location history
2015–2020Based in San Jose, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 12 | 2012–2020 |
| KIM BOK HOEN | 4 | 2012–2013 |
| NOVELLUS SYSTEMS INC | 4 | 2005–2011 |
| PARK HEUNG LAKself | 4 | 2012–2013 |
| CAI MAN-PING | 2 | 2012–2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Jose, California, US | 7 | 2015–2020 |
| Santa Clara, California, US | 5 | 2012–2016 |
| Wilsonville, OR, US | 4 | 2005–2011 |
| Ichon-shi, KR | 1 | 1999 |
| Ichon, KR | 1 | 1998 |