Inventor
Wataru Takayama
Inventor
Miyagi, JP
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices24%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
H01JElectric discharge tubes or discharge lamps17%
H05HPlasma technique10%
H10BElectronic memory devices10%
H10DInorganic electric semiconductor devices10%
B08BCleaning in general3%
PatentTitleYear
10,867,777Plasma processing method and plasma processing apparatus202010,707,090Plasma etching method202010,692,729Etching process method20209,966,273Plasma etching method20189,779,961'Etching method'20179,666,446'Etching method'20179,230,824'Method of manufacturing semiconductor device'2016Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2016–2020Patents assigned to TOKYO ELECTRON LTD (7)· patent assignee history
2016–2020Based in Miyagi, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 7 | 2016–2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Miyagi, JP | 7 | 2016–2020 |