Inventor
Hsi-Cheng Hsu
Inventor
Taichung, TW
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B81Bprimary
B81BMicrostructural devices or systems, e.g. micromechanical devices27%
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems27%
H01LSemiconductor devices12%
G01PMeasuring linear or angular speed, acceleration, deceleration, or shock6%
H01GCapacitors6%
H10DInorganic electric semiconductor devices6%
Y10TTechnical subjects covered by former us classification6%
H01JElectric discharge tubes or discharge lamps3%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h103%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h103%
PatentTitleYear
10,532,925Heater design for MEMS chamber pressure control202010,513,432Anti-stiction process for MEMS device201910,155,656Inter-poly connection for parasitic capacitor and die size improvement201810,131,536Heater design for MEMS chamber pressure control20189,884,758'Selective nitride outgassing process for MEMS cavity pressure control'20189,880,192'Method of manufacturing a motion sensor device'20189,561,954'Method of fabricating MEMS devices having a plurality of cavities'20179,527,721'Movement microelectromechanical systems (MEMS) package'20169,090,452'Mechanism for forming MEMS device'20158,960,003'Motion sensor device and methods for forming the same'20158,916,943'MEMS devices having a plurality of cavities'2014Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2014–2015Patents assigned to TAIWAN SEMICONDUCTOR MFG (2)· patent assignee history
2014–2020Based in Taichung, TW· patent location history
2015–2020Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (9)· patent assignee history
2015Patents assigned to CHENG SHYH-WEI (1)· patent assignee history
2015Patents assigned to CHU CHE-JUNG (1)· patent assignee history
2015Patents assigned to HSU HSI-CHENG (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 9 | 2015–2020 |
| TAIWAN SEMICONDUCTOR MFG | 2 | 2014–2015 |
| CHENG SHYH-WEI | 1 | 2015 |
| CHU CHE-JUNG | 1 | 2015 |
| HSU HSI-CHENGself | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Taichung, TW | 11 | 2014–2020 |