Inventor
Tatsuhisa Matsunaga
Inventor
Tokyo, JP
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1044%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests22%
C23CCoating metallic material17%
B29CShaping or joining of plastics6%
C30BSingle-crystal growth6%
Y10TTechnical subjects covered by former us classification6%
PatentTitleYear
RE043023'Dual loading port semiconductor processing equipment'20117,198,447'Semiconductor device producing apparatus and producing method of semiconductor device'20076,927,165'Method and apparatus for processing substrates and method for manufacturing a semiconductor device'20056,737,613'Heat treatment apparatus and method for processing substrates'20046,658,321'Substrate processing method and apparatus'20036,641,350'Dual loading port semiconductor processing equipment'20036,638,860'Method and apparatus for processing substrates and method for manufacturing a semiconductor device'20036,540,469'Substrate processing apparatus'20035,371,931'Production system for molded and pressed parts'1994Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1994Patents assigned to HITACHI LTD (1)· patent assignee history
1994–2007Based in Fujisawa, JP· patent location history
2003–2011Patents assigned to HITACHI INT ELECTRIC INC (8)· patent assignee history
2003–2011Based in Tokyo, JP· patent location history
2011Patents assigned to MATSUNAGA TATSUHISA (1)· patent assignee history
2011Patents assigned to NAKASHIMA TAKANOBU (1)· patent assignee history
2011Patents assigned to YANAGAWA HIDEHIRO (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI INT ELECTRIC INC | 8 | 2003–2011 |
| HITACHI LTD | 1 | 1994 |
| MATSUNAGA TATSUHISAself | 1 | 2011 |
| NAKASHIMA TAKANOBU | 1 | 2011 |
| YANAGAWA HIDEHIRO | 1 | 2011 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tokyo, JP | 7 | 2003–2011 |
| Fujisawa, JP | 2 | 1994–2007 |