Inventor
TZU-JUNG PAN
Inventor
TW
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices55%
H05GX-ray technique27%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1018%
PatentTitleYear
12,541,152EUV lithography system with 3D sensing and tunning modules202612,461,454Semiconductor processing tool and method of using the same202512,372,880System and method for detecting debris in a photolithography system202512,235,593System and method for dynamically controlling temperature of thermostatic reticles202511,852,978EUV lithography system with 3D sensing and tunning modules202311,693,326System and method for dynamically controlling temperature of thermostatic reticles2023Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2023–2026Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (6)· patent assignee history
2023–2026Based in TW· patent location history
2026Patents assigned to TAIWAN SEMCONDUCTOR MFG COMPANY LTD (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 6 | 2023–2026 |
| TAIWAN SEMCONDUCTOR MFG COMPANY LTD | 1 | 2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| TW | 6 | 2023–2026 |