Inventor
Kazutoshi Yoshioka
Inventor
Kumamoto, JP
Overview
Patents· 14 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices41%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1026%
B05CApparatus for applying fluent materials to surfaces, in general19%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests15%
PatentTitleYear
6,551,400'Coating apparatus'20036,503,003'Film forming method and film forming apparatus'20036,268,013'Coating a resist film, with pretesting for particle contamination'20016,261,744'Baking apparatus and baking method'20016,228,561'Film forming method and film forming apparatus'20016,168,667'Resist-processing apparatus'20016,051,349'Apparatus for coating resist and developing the coated resist'20006,002,108'Baking apparatus and baking method'19995,968,691'Method and apparatus for coating resist and developing the coated resist'19995,938,847'Method and apparatus for coating a film on an object being processed'19995,460,478'Method for processing wafer-shaped substrates'19955,364,222'Apparatus for processing wafer-shaped substrates'19945,297,910'Transportation-transfer device for an object of treatment'19944,812,201'Method of ashing layers, and apparatus for ashing layers'1989Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1989–2003Patents assigned to TOKYO ELECTRON LTD (14)· patent assignee history
1989–2001Based in Kumamoto, JP· patent location history
1994–1995Patents assigned to TEL KYUSHU KK (3)· patent assignee history
1994Based in Kamoto, JP· patent location history
2001Based in Kumamto-ken, JP· patent location history
2003Based in Nishikamo-gun, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 14 | 1989–2003 |
| TEL KYUSHU KK | 3 | 1994–1995 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kumamoto, JP | 10 | 1989–2001 |
| Nishikamo-gun, JP | 2 | 2003 |
| Kumamto-ken, JP | 1 | 2001 |
| Kamoto, JP | 1 | 1994 |