Inventor
Kyung-dae Kim
Inventor
Suwon-si, KR
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
C11DDetergent compositions22%
B24BMachines, devices, or processes for grinding or polishing17%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices11%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests11%
G02BOptical elements, systems or apparatus6%
PatentTitleYear
7,223,721'Resist and etching by-product removing composition and resist removing method using the same'20077,208,454'Cleaning solution for removing anti-reflective coating composition'20077,081,182'Method and apparatus for automatically measuring the concentration of TOC in a fluid used in a semiconductor manufacturing process'20066,898,007'Microscope for inspecting semiconductor wafer'20056,860,801'Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatus'20056,777,379'Cleaning solution and method of cleaning anti-reflective coating composition using the same'20046,713,440'Resist and etching by-product removing composition and resist removing method using the same'20046,655,042'System and method for drying semiconductor substrate'20036,537,143'Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatus'20036,443,826'Polishing head of a chemical mechanical polishing apparatus and, retainer ring of the same'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002–2007Patents assigned to SAMSUNG ELECTRONICS CO LTD (10)· patent assignee history
2002–2007Based in Suwon-si, KR· patent location history
2005Based in Gyeonggi-do, KR· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SAMSUNG ELECTRONICS CO LTD | 10 | 2002–2007 |
Locations
| Location | Patents | Span |
|---|---|---|
| Suwon-si, KR | 9 | 2002–2007 |
| Gyeonggi-do, KR | 1 | 2005 |