Inventor
YUHOU WANG
Inventor
US
Overview
Patents· 15 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps34%
H03FAmplifiers16%
H05HPlasma technique16%
H03KPulse technique9%
H02MApparatus for conversion between ac and ac, between ac and dc, or between dc and dc, and for use with mains or similar power supply systems5%
Y02BClimate change mitigation technologies related to buildings, e.g. housing, house appliances or related end-user applications5%
B25JManipulators2%
G01BMeasuring length, thickness or similar linear dimensions2%
G01RMeasuring electric variables2%
H01LSemiconductor devices2%
PatentTitleYear
12,507,338Matchless plasma source for semiconductor wafer fabrication202512,490,370Matchless plasma source for semiconductor wafer fabrication202512,484,139Matchless plasma source for semiconductor wafer fabrication202512,471,202Matchless plasma source for semiconductor wafer fabrication202512,424,410RF pulsing within pulsing for semiconductor RF plasma processing202512,397,435Substrate location detection and adjustment202512,261,029Protection system for switches in direct drive circuits of substrate processing systems202512,193,138Matchless plasma source for semiconductor wafer fabrication202512,165,841Dual-frequency, direct-drive inductively coupled plasma source202411,728,136RF pulsing within pulsing for semiconductor RF plasma processing202311,728,137Direct frequency tuning for matchless plasma source in substrate processing systems202311,716,805Matchless plasma source for semiconductor wafer fabrication202311,437,219Frequency tuning for a matchless plasma source202211,342,159RF pulsing within pulsing for semiconductor RF plasma processing202211,224,116Matchless plasma source for semiconductor wafer fabrication2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to LAM RES CORP (15)· patent assignee history
2022–2025Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 15 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 15 | 2022–2025 |