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Inventor

Shinya Shima

Inventor
Yamanashi, JP

Overview

5→
Patents
2011–2017
Patent span
Electricity
Primary field (CPC H)

Patents· 5 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material28%
H01JElectric discharge tubes or discharge lamps28%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1028%
H01LSemiconductor devices17%
PatentTitleYear
9,728,381'Plasma processor and plasma processing method'20179,437,402'Plasma processor and plasma processing method'20168,904,957'Plasma processor and plasma processing method'20148,387,562'Plasma processor and plasma processing method'20138,056,503'Plasma procesor and plasma processing method'2011

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2011–2017Patents assigned to TOKYO ELECTRON LTD (5)· patent assignee history
2011–2013Patents assigned to GONDAI TADASHI (2)· patent assignee history
2011–2013Patents assigned to HIGUCHI KIMIHIRO (2)· patent assignee history
2011–2013Patents assigned to KAYAMORI SATOSHI (2)· patent assignee history
2011–2013Patents assigned to KIKUCHI AKIHIRO (2)· patent assignee history
2011–2013Based in Nirasaki, JP· patent location history
2014–2017Based in Yamanashi, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD52011–2017
GONDAI TADASHI22011–2013
HIGUCHI KIMIHIRO22011–2013
KAYAMORI SATOSHI22011–2013
KIKUCHI AKIHIRO22011–2013
Locations
LocationPatentsSpan
Yamanashi, JP32014–2017
Nirasaki, JP22011–2013