Inventor
HIROKAZU UEDA
Inventor
JP
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material19%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1019%
H01JElectric discharge tubes or discharge lamps17%
H01LSemiconductor devices14%
H05HPlasma technique8%
B05CApparatus for applying fluent materials to surfaces, in general3%
B05DProcesses for applying fluent materials to surfaces, in general3%
B08BCleaning in general3%
C11DDetergent compositions3%
F25BRefrigeration machines, plants or systems3%
PatentTitleYear
12,486,575Apparatus for processing substrate, gas shower head, and method for processing substrate202512,417,928Substrate processing method and substrate processing system202512,406,862Vacuum processing apparatus and oxidizing gas removal method202512,247,768Electrocaloric effect element, heat transfer device, semiconductor manufacturing device, and electrocaloric effect element control method202512,112,921Plasma processing method and plasma processing apparatus202412,077,865Film forming method and film forming apparatus202412,060,641Film forming method and film forming apparatus202412,011,738Substrate processing method and ionic liquid202411,972,929Processing apparatus and film forming method202411,842,886Plasma processing method and plasma processing apparatus202311,615,957Method for forming boron-based film, formation apparatus202311,145,522Method of forming boron-based film, and film forming apparatus2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2025Patents assigned to TOKYO ELECTRON LTD (12)· patent assignee history
2021–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 12 | 2021–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 12 | 2021–2025 |