Inventor
Linda N. Marquez
Inventor
Fremont, CA, US
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1036%
H01JElectric discharge tubes or discharge lamps16%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1016%
H01LSemiconductor devices12%
A63GMerry-go-rounds4%
C23CCoating metallic material4%
G02BOptical elements, systems or apparatus4%
H10DInorganic electric semiconductor devices4%
H10FInorganic semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation4%
PatentTitleYear
10,825,659Substrate processing chamber including multiple gas injection points and dual injector20209,911,620'Method for achieving ultra-high selectivity while etching silicon nitride'20189,558,928'Contact clean in high-aspect ratio structures'20178,801,947'Methods for forming microlenses'20148,033,922'Manually pushed swing'20117,153,780'Method and apparatus for self-aligned MOS patterning'20066,228,774'High aspect ratio sub-micron contact etch process in an inductively-coupled plasma processing system'20016,165,910'Self-aligned contacts for semiconductor device'20006,133,153'Self-aligned contacts for semiconductor device'20005,783,496'Methods and apparatus for etching self-aligned contacts'1998Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1998–2020Patents assigned to LAM RES CORP (7)· patent assignee history
1998–2006Based in Fremont, CA, US· patent location history
2006Patents assigned to INTEL CORP (1)· patent assignee history
2011Patents assigned to MARQUEZ LINDA (1)· patent assignee history
2011Based in Desert Hot Springs, CO, US· patent location history
2014Patents assigned to MATTSON TECH INC (1)· patent assignee history
2014–2020Based in San Jose, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 7 | 1998–2020 |
| INTEL CORP | 1 | 2006 |
| MARQUEZ LINDAself | 1 | 2011 |
| MATTSON TECH INC | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Fremont, California, US | 5 | 1998–2006 |
| San Jose, California, US | 4 | 2014–2020 |
| Desert Hot Springs, CO, US | 1 | 2011 |