Inventor
Charles Dornfest
Inventor
Fremont, CA, US
Overview
Patents· 34 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material31%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
H01JElectric discharge tubes or discharge lamps14%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests14%
Y10TTechnical subjects covered by former us classification10%
B08BCleaning in general3%
C30BSingle-crystal growth2%
C25DProcesses for the electrolytic or electrophoretic production of coatings1%
F16BDevices for fastening or securing constructional elements or machine parts together, e.g. nails, bolts, circlips, clamps, clips or wedges1%
H10DInorganic electric semiconductor devices1%
PatentTitleYear
7,629,031'Plasma enhanced bonding for improving adhesion and corrosion resistance of deposited films'20096,635,114'High temperature filter for CVD apparatus'20036,616,767'High temperature ceramic heater assembly with RF capability'20036,527,865'Temperature controlled gas feedthrough'20036,358,810'Method for superior step coverage and interface control for high K dielectric capacitors and related electrodes'20026,270,859'Plasma treatment of titanium nitride formed by chemical vapor deposition'20016,258,170'Vaporization and deposition apparatus'20016,214,160'Method and apparatus for removing particulates from semiconductor substrates in plasma processing chambers'20016,210,485'Chemical vapor deposition vaporizer'20016,165,271'Temperature controlled process and chamber lid'20006,129,044'Apparatus for substrate processing with improved throughput and yield'20006,123,773'Gas manifold'20006,099,651'Temperature controlled chamber liner'20006,096,134'Liquid delivery system'20006,082,714'Vaporization apparatus and process'20006,077,562'Method for depositing barium strontium titanate'20006,066,209'Cold trap'20006,063,199'Temperature controlled liner'20006,056,823'Temperature controlled gas feedthrough'20005,994,678'Apparatus for ceramic pedestal and metal shaft assembly'19995,968,379'High temperature ceramic heater assembly with RF capability and related methods'19995,964,947'Removable pumping channel liners within a chemical vapor deposition chamber'19995,959,409'Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method protecting such heated metal surfaces'19995,882,424'Plasma cleaning of a CVD or etch reactor using a low or mixed frequency excitation field'19995,853,607'CVD processing chamber'19985,846,332'Thermally floating pedestal collar in a chemical vapor deposition chamber'19985,779,807'Method and apparatus for removing particulates from semiconductor substrates in plasma processing chambers'19985,705,225'Method of filling pores in anodized aluminum parts'19985,680,013'Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method of protecting such heated metal surfaces'19975,589,003'Shielded substrate support for processing chamber'19965,558,717'CVD Processing chamber'19965,531,835'Patterned susceptor to reduce electrostatic force in a CVD chamber'19965,496,142'Slotted conical spring washer'19965,454,903'Plasma cleaning of a CVD or etch reactor using helium for plasma stabilization'1995Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1995–2003Patents assigned to APPLIED MATERIALS INC (32)· patent assignee history
1995–2009Based in Fremont, CA, US· patent location history
2003Patents assigned to APPLIED MATERIAL INC (1)· patent assignee history
2009Patents assigned to SUB ONE TECHNOLOGY INC (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 32 | 1995–2003 |
| APPLIED MATERIAL INC | 1 | 2003 |
| SUB ONE TECHNOLOGY INC | 1 | 2009 |
Locations
| Location | Patents | Span |
|---|---|---|
| Fremont, California, US | 34 | 1995–2009 |