Inventor
Che-Hao Tu
Inventor
Hsinchu, TW
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1032%
H01LSemiconductor devices29%
H10DInorganic electric semiconductor devices21%
B24BMachines, devices, or processes for grinding or polishing11%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h107%
PatentTitleYear
10,800,004System and method of chemical mechanical polishing202010,510,552Hard mask removal method20199,960,050Hard mask removal method20189,941,109Surface treatment in a chemical mechanical process20189,922,837'Asymmetric application of pressure to a wafer during a CMP process'20189,711,374'Mechanisms for forming oxide layer over exposed polysilicon during a chemical mechanical polishing (CMP) process'20179,595,450'Composite structure for gate level inter-layer dielectric'20178,975,179'Planarization process for semiconductor device fabrication'20158,598,028'Gate height loss improvement for a transistor'2013Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2013–2015Patents assigned to CHEN LIANG-GUANG (2)· patent assignee history
2013–2015Patents assigned to CHEN YING-TSUNG (2)· patent assignee history
2013–2015Patents assigned to HONG WEILUN (2)· patent assignee history
2013–2015Patents assigned to TAIWAN SEMICONDUCTOR MFG (2)· patent assignee history
2013–2020Based in Hsinchu, TW· patent location history
2017–2020Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (7)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 7 | 2017–2020 |
| CHEN LIANG-GUANG | 2 | 2013–2015 |
| CHEN YING-TSUNG | 2 | 2013–2015 |
| HONG WEILUN | 2 | 2013–2015 |
| TAIWAN SEMICONDUCTOR MFG | 2 | 2013–2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Hsinchu, TW | 9 | 2013–2020 |