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Inventor

NOBUTAKA FUKUNAGA

Inventor
JP

Overview

3→
Patents
2025
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B24Bprimary
B24BMachines, devices, or processes for grinding or polishing38%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1038%
H01LSemiconductor devices25%
PatentTitleYear
12,377,519Substrate processing apparatus and substrate processing method202512,290,898Substrate processing method and substrate processing apparatus202512,194,594Substrate processing method and substrate processing apparatus2025

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2025Patents assigned to TOKYO ELECTRON LTD (3)· patent assignee history
2025Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD32025
Locations
LocationPatentsSpan
JP32025