Inventor
Shahryar Rokni
Inventor
Carlsbad, CA, US
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices47%
H01SDevices using the process of light amplification by stimulated emission of radiation [laser] to amplify or generate light47%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light7%
PatentTitleYear
6,882,674'Four KHz gas discharge laser system'20056,757,316'Four KHz gas discharge laser'20046,704,339'Lithography laser with beam delivery and beam pointing control'20046,539,042'Ultra pure component purge system for gas discharge laser'20036,504,860'Purge monitoring system for gas discharge laser'20036,028,880'Automatic fluorine control system'20005,978,406'Fluorine control system for excimer lasers'1999Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1999–2005Patents assigned to CYMER INC (7)· patent assignee history
1999–2005Based in Carlsbad, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CYMER INC | 7 | 1999–2005 |
Locations
| Location | Patents | Span |
|---|---|---|
| Carlsbad, California, US | 7 | 1999–2005 |