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Inventor

KIRILL URIEVICH SOBOLEV

Inventor
US

Overview

2→
Patents
2022–2025
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices67%
G01NInvestigating or analysing materials by determining their chemical or physical properties33%
PatentTitleYear
12,405,227Method for region of interest processing for reticle particle detection202511,526,091Sensor apparatus and method for lithographic measurements2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022–2025Patents assigned to ASML HOLDING NV (2)· patent assignee history
2022–2025Based in US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ASML HOLDING NV22022–2025
Locations
LocationPatentsSpan
US22022–2025