Inventor

Sheng-Ta Lin

Inventor

Miao-Li County, TW

Overview

3→

Patents

2018–2021

Patent span

Physics

Primary field (CPC G)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary

G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices67%

G02FOptical devices or arrangements for the control of light by modification of the optical properties of the media of the elements involved therein33%

PatentTitleYear

10,990,026Lithography apparatus and cleaning method thereof2021 10,942,459Lithography system and cleaning method thereof2021 10,146,098Transparent display device2018

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2018Patents assigned to NATIONAL SUN YAT SEN UNIVERSITY (1)· patent assignee history

2018Based in Kaohsiung, TW· patent location history

2021Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (2)· patent assignee history

2021Based in Miao-Li County, TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
TAIWAN SEMICONDUCTOR MFG CO LTD	2	2021
NATIONAL SUN YAT SEN UNIVERSITY	1	2018

Locations

Location	Patents	Span
Miao-Li County, TW	2	2021
Kaohsiung, TW	1	2018