LexDanaLexDanabeta
Inventor

Herbert Eigenstetter

Inventor
Planegg, DE

Overview

2→
Patents
1987–1989
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
4,814,626'Method for high precision position measurement of two-dimensional structures'19894,703,185'Arrangement for optical imaging of two subjects located in different object planes'1987

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1987–1989Patents assigned to SIEMENS AG (2)· patent assignee history
1987–1989Based in Planegg, DE· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
SIEMENS AG21987–1989
Locations
LocationPatentsSpan
Planegg, DE21987–1989