Inventor
Huichao Qin
Inventor
Beijing, CN
Overview
Patents· 3 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices67%
G01BMeasuring length, thickness or similar linear dimensions33%
PatentTitleYear
9,904,183'Coarse motion and fine motion integrated reticle stage driven by planar motor'20189,903,704'Three-DOF heterodyne grating interferometer displacement measurement system'20189,791,789'Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor'2017Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2017–2018Patents assigned to UNIV TSINGHUA (3)· patent assignee history
2017Patents assigned to BEIJING U-PRECISION TECH CO LTD (1)· patent assignee history
2017–2018Based in Beijing, CN· patent location history
2018Patents assigned to BEIJING U PREC TECH CO LTD (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| UNIV TSINGHUA | 3 | 2017–2018 |
| BEIJING U PREC TECH CO LTD | 1 | 2018 |
| BEIJING U-PRECISION TECH CO LTD | 1 | 2017 |
Locations
| Location | Patents | Span |
|---|---|---|
| Beijing, CN | 3 | 2017–2018 |