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Inventor

Stephen R Burgess

Inventor
Gwent, GB

Overview

23→
Patents
2003–2021
Patent span
Electricity
Primary field (CPC H)

Patents· 23 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material31%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
H01JElectric discharge tubes or discharge lamps15%
H01LSemiconductor devices8%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h108%
H10DInorganic electric semiconductor devices5%
C01BNon-metallic elements2%
F24CDomestic stoves or ranges2%
G01SRadio direction-finding2%
H03HImpedance networks, e.g. resonant circuits2%
PatentTitleYear
11,127,568Plasma etching apparatus202110,900,114Method and apparatus for depositing a material202110,622,193Plasma etching apparatus202010,601,388Method of deposition202010,153,135Plasma etching apparatus201810,096,468Method of improving adhesion20189,803,272'Deposition of silicon dioxide'20179,783,886'PE-CVD apparatus and method'20179,728,432'Method of degassing'20179,719,166'Method of supporting a workpiece during physical vapour deposition'20179,670,574'Methods of depositing aluminium layers'20179,472,610'Substrate'20169,165,762'Method of depositing silicone dioxide films'20159,048,066'Method of etching'20158,728,953'Method and apparatus for processing a semiconductor workpiece'20148,337,675'Method of plasma vapour deposition'20127,876,257'Method and apparatus for compressing SAR signals'20117,732,307'Method of forming amorphous TiN by thermal chemical vapor deposition (CVD)'20107,378,001'Magnetron sputtering'20087,282,158'Method of processing a workpiece'20076,933,099'Method of forming a patterned metal layer'20056,860,975'Barrier layer and method of depositing a barrier layer'20056,660,140'Sputtering apparatus'2003

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2003–2005Patents assigned to TRIKON HOLDINGS LTD (2)· patent assignee history
2003–2021Based in Gwent, GB· patent location history
2007–2010Patents assigned to AVIZA TECHNOLOGY LTD (2)· patent assignee history
2008Patents assigned to AVIZA EUROP LTD (1)· patent assignee history
2008–2016Based in Ebbw Vale, GB· patent location history
2011Based in Walpole, MA, US· patent location history
2012–2021Patents assigned to SPTS TECHNOLOGIES LTD (16)· patent assignee history
2012–2017Patents assigned to BURGESS STEPHEN (2)· patent assignee history
2017Based in Wales, GB· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
SPTS TECHNOLOGIES LTD162012–2021
AVIZA TECHNOLOGY LTD22007–2010
BURGESS STEPHENself22012–2017
TRIKON HOLDINGS LTD22003–2005
AVIZA EUROP LTD12008
Locations
LocationPatentsSpan
Gwent, GB182003–2021
Ebbw Vale, GB32008–2016
Wales, GB12017
Walpole, Massachusetts, US12011