Inventor
SHIH-CHE WANG
Inventor
TW
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices28%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1028%
H01LSemiconductor devices24%
B01DSeparation3%
B05BSpraying apparatus3%
B67DDispensing, delivering or transferring liquids, not otherwise provided for3%
G01NInvestigating or analysing materials by determining their chemical or physical properties3%
G06TImage data processing or generation, in general3%
Y10TTechnical subjects covered by former us classification3%
PatentTitleYear
12,594,571Method and apparatus for reducing solvent consumption202612,362,179Method and apparatus for coating photo resist over a substrate202512,025,917System and method for supplying and dispensing bubble-free photolithography chemical solutions202412,001,132Protection layer on low thermal expansion material (LTEM) substrate of extreme ultraviolet (EUV) mask202411,955,335Method and apparatus for coating photo resist over a substrate202411,798,800Method and apparatus for solvent recycling202311,624,985Methods of defect inspection202311,545,361Method and apparatus for coating photo resist over a substrate2023Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2023–2025Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (7)· patent assignee history
2023–2026Based in TW· patent location history
2026Patents assigned to TAIWAN SEMICONDUCTOR MFG COMPANY LTD (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 7 | 2023–2025 |
| TAIWAN SEMICONDUCTOR MFG COMPANY LTD | 1 | 2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| TW | 8 | 2023–2026 |