Inventor
Toshinari Takata
Inventor
Chigasaki, JP
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
H01JElectric discharge tubes or discharge lamps33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
5,226,056'Plasma ashing method and apparatus therefor'1993Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1993Patents assigned to ULVAC CORP (1)· patent assignee history
1993Based in Chigasaki, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ULVAC CORP | 1 | 1993 |
Locations
| Location | Patents | Span |
|---|---|---|
| Chigasaki, JP | 1 | 1993 |