Inventor
Peter Danny Van Voorst
Inventor
Nijmegen, NL
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices32%
G01NInvestigating or analysing materials by determining their chemical or physical properties26%
G02BOptical elements, systems or apparatus16%
G01BMeasuring length, thickness or similar linear dimensions11%
H05GX-ray technique11%
G21KHandling of particles or ionising radiation not otherwise provided for5%
PatentTitleYear
10,725,381Optical systems, metrology apparatus and associated method202010,670,974Metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrate202010,451,559Illumination source for an inspection apparatus, inspection apparatus and inspection method201910,330,606Illumination source for an inspection apparatus, inspection apparatus and inspection method201910,185,224Method and apparatus for inspection and metrology20199,811,001'Method and apparatus for inspection and metrology'2017Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2017–2020Patents assigned to ASML NETHERLANDS BV (6)· patent assignee history
2017–2020Based in Nijmegen, NL· patent location history
2019Based in Nijmegan, NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 6 | 2017–2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Nijmegen, NL | 5 | 2017–2020 |
| Nijmegan, NL | 1 | 2019 |